Polymer Resins for MEMS

The need for micro-sized devices that operate at high capacity and high temperatures is growing.  The emerging applications of these devices, known as microelectromechanical devices (MEMS), range from simple sensors and actuators to entire complex systems.  KDT offers polymer precursors to silicon based ceramics, such as SiCN, that can be used as the structural building blocks for such devices.  Ceramics are beneficial in MEMS applications for a variety of reasons including their corrosion resistance, chemical inertness, thermal stability, low density and mechanical properties.  In addition, because ceramics are flaw-size sensitive, their strength and reliability will be unsurpassed in small scale applications.

Benefits of Using KDT Polymer Resins for MEMS Devices:

• High thermal stability
• Can be cured by variety of mechanisms including UV cure
• Can be cast into net shape and cross-linked to rigid polymer
• Easily processed by a variety of techniques such as microcasting and photopolymerization
• Corrosion resistance and chemical inertness

KDT Polymer Products for MEMS Applications:

• KDT Ceraset Polyureasilazane